Effect of Annealing Temperature on the Microstructure of Barium Strontium Titanate Films

摘要：

　　Barium strontium titanate (Ba1-xSrxTiO3,BST) films have been prepared on Pt/Ti/SiO2/Si by medium frequency (MF) magnetron sputtering,and subsequently in situ crystallized at 500-700℃.The microstructures of the MF-BST films are studied.BST films prepared by radio frequency (RF) magnetron sputtering and exhibited preferential (110) orientation,are compared.XRD shows that the MF-BST films exhibit preferential (111) orientation and better crystallization than the RF-BST films at the same annealing temperature.AFM displayed that the MF-BST films were smooth and compact.XPS analysis exhibited that the MF-BST films revealed better surface and interface structural characteristics.Their dielectric properties were also compared.

关键词： Barium strontium titanate film Medium frequency magnetron sputtering

作者: Jiaxuan Liao Enqiu Li Zhong Tian Jiang Xu Haiguang Yang

作者单位: Research Institute of Electronic Science and Technology,University of Electronic Science and Technology of China,ChengDu 610054,P.R.China

会议类型: 国际会议

会议名称: The Fifth China International Conference on High-Performance Ceramics (第五届先进陶瓷国际研讨会(CICC-5))

会议地点: 长沙

会议语种:英文

页码: 56-58

在线出版日期: 2007-05-10（万方平台首次上网日期，不代表论文的发表时间）