Bi4-xLaxTi3O12 Ferroelectric Thin Films Prepared by RF Magnetron Sputtering

摘要：

　　Bi4-xLaxTi3O12 (BLT) ferroelectric thin films were deposited on Pt/Si substrates by RF magnetron sputtering with Bi4-xLaxTi3O12 (x=0.5,0.75,1) targets with 50-mm diameter and 5-mm thickness.The effects of La contents on microstructure and ferroelectric properties of Bi4-xLaxTi3O12 thin films were investigated.The grain growth behavior and ferroelectric properties such as remanent polarization were found to be dependent on the La contents in the BLT thin films.

关键词： BLT thin films RF magnetron sputtering Ferroelectric property

作者: Xingao Li Zuli Liu Anyou Zuo Zuobin Yuan Jianping Yang Kailun Yao

作者单位: Department of Physics,Huazhong University of Science and Technology,Wuhan 430074,China;Department of Department of Physics,Huazhong University of Science and Technology,Wuhan 430074,China Department of Physics,Hubei Institute for Nationalities,Enshi 445000,China

会议类型: 国际会议

会议名称: The Fifth China International Conference on High-Performance Ceramics (第五届先进陶瓷国际研讨会(CICC-5))

会议地点: 长沙

会议语种:英文

页码: 109-111

在线出版日期: 2007-05-10（万方平台首次上网日期，不代表论文的发表时间）