Ultrasonic Linear Motor with a High Stiffness Support Mechanism for Precision Control
New holding mechanism is proposed to improve the positioning capability of ultrasonic linear motor based on previous researches proposed by the authors.Through the previous holding mechanism using a resonance system,the remarkable operating stability and controllability at high-power driving were achieved.However,when higher power is demanded,big noise in supporting parts of a resonance system is generated and these parts could be damaged and worn due to the discordance of a resonance frequency between a transducer and supporting horns.Also the coupling problem of two vibration modes remains because of using a half wavelength.This research proposes a new design of ultrasonic motor with three supporting points in one vibrator for high stiffness support and discusses the solution about the coupling effect and the nano-level positioning capability.Finally,a maximum driving mechanical force and the positioning accuracy were achieved over 75 N and 100 nm through this mechanism.Moreover,the efficiency of motor was 35% when the trust force was 52 N and the velocity was 0.27 m/s.
Ultrasonic linear motor High stiffness support Nanometer positioning
Cheol-Ho Yun Wan-Soo Kim Hyun-Rok Cha Tea-Uk Jung Sun-Kyu Lee
Gwangju Research Center,Korea Institue of Industrial Technology,Korea Department of Mechatronics,Gwangju Institute of Science and Technology,Korea
国际会议
The Fifth China International Conference on High-Performance Ceramics (第五届先进陶瓷国际研讨会(CICC-5))
长沙
英文
204-207
2007-05-10（万方平台首次上网日期，不代表论文的发表时间）