A Novel Piezoelectric Micro-motor using Multilayer Co-firing Piezoelectric Ceramics

摘要：

　　A novel rotary piezoelectric micro-motor (φ8mm× 10mm) is proposed in this paper.Different from the conventional traveling wave ultrasonic motor using piezoelectric ceramic ring,four multilayer co-firing piezoelectric ceramic bulks (2mm×2mm×3mm) are used to generate vibration in the ring type stator.The layout and electric signals applied to the piezoelectric ceramic bulks are designed for the purpose of generating elliptical trajectories on the surface of the stator.The working mode of the prototype motor is simulated by the finite element method,and also measured by the Doppler Laser Vibrometer.The experimental results are in good agreement with simulation,which verifies the effectiveness of the finite element model.The prototype motor is driven at the low voltage of 12V under the frequency of 64.91 KHz.

关键词： Piezoelectric micro-motor Multilayer piezoelectric ceramic Co-firing FEM

作者: Ye Ji Xiangcheng Chu Longtu Li Zhilun Gui

作者单位: State Key Lab.of New Ceramics and Fine Processing,Tsinghua University,Beijing 100084,China

会议类型: 国际会议

会议名称: The Fifth China International Conference on High-Performance Ceramics (第五届先进陶瓷国际研讨会(CICC-5))

会议地点: 长沙

会议语种:英文

页码: 208-210

在线出版日期: 2007-05-10（万方平台首次上网日期，不代表论文的发表时间）