A Piezoelectric Micropump Based on MEMS Fabrication

摘要：

　　This paper presents a valve-less micropump which is actuated by a piezoelectric ceramic chip.We employ a microelectromechanical system process for the silicon substrate and anodic bonding for assembly of the Pyrex glass and silicon wafer.The reciprocating type micropump contains two nozzle/diffuser elements and a silicon membrane with an embedded piezoelectric ceramic actuator.

关键词： Piezoelectric Micropump MEMS

作者: Baowei Wang Xiangcheng Chu Longtu Li

作者单位: State Key Laboratory of New Ceramics and Fine Processing,Department of Material Science and Engineering,Tsinghua University,Beijing 100084,P.R.China

会议类型: 国际会议

会议名称: The Fifth China International Conference on High-Performance Ceramics (第五届先进陶瓷国际研讨会(CICC-5))

会议地点: 长沙

会议语种:英文

页码: 215-217

在线出版日期: 2007-05-10（万方平台首次上网日期，不代表论文的发表时间）