Finite Element Analysis and Design of Monolithic Multilayer Piezoelectric Micromanipulator
A novel model of 3-DOF multilayer PZT micromanipulator is promoted and simulated with finite element analysis method.States under different applied voltages were discussed,including the motion along axis Z and the rotation along axis X and the bisector between X-Y.After analyzing the distribution of stress,we propose some method,which helps to improve the performance of the micromanipulator.We also do some quantificational analysis about the micromanipulator,discovering that the relationship between the displacements of the probe and applied voltages is almost perfectly linear.By comparing the constant D defining the relationship of the displacements of probe tip and applied voltages,the simulation is proved to be correct.Comparing the performance between the single-layer and multi-layer PZT,it shows that the multi-layer PZT can reduce input voltages,whereas can produce the same displacement.Ceramic sample is prepared for further experiment.
Micromanipulator Multi-DOF FEM Actuator
Chu Xiangcheng Huang Jinding Li Longtu Gui Zhilun
State Key Lab.of New Ceramics and Fine Processing,Tsinghua University,Beijing 100084,China
国际会议
The Fifth China International Conference on High-Performance Ceramics (第五届先进陶瓷国际研讨会(CICC-5))
长沙
英文
218-220
2007-05-10（万方平台首次上网日期，不代表论文的发表时间）