Fabrication of Piezoelectric Cantilever Beam Based on Nanostructured PZT Film

摘要：

　　A sol-gel technology to fabricate PZT thick film for cantilever beam was investigated.In this process,PZT nano-powder is dispersed into a PZT sol solution,which is identical with the powder in composition,and then the PZT suspension and clean PZT sol solution were deposited alternately on an Au/Cr/SiO2/Si substrate using spin-coating mute.Above process was repeated in order to deposit the desired thickness.The results showed that the perovskite PZT thick film with thickness of about 4 μm was obtained after annealing at 650 ℃ for 2 h and it has the saturation polarization of 54 μC/cm2,the remnant polarization of 30 μC/cm2 and the coercive field of 50 kV/cm.

关键词： PZT Thick film Sol-gel Cantilever beam

作者: Hongmei Liu Quanliang Zhao Chengjun Qiu Maosheng Cao

作者单位: Key Lab of Integrated Circuit,Heilongjiang University,Harbin 150080,China;School of Material Science School of Material Science and Engineering,Beijing Institute of Technology,Beijing 100081,China

会议类型: 国际会议

会议名称: The Fifth China International Conference on High-Performance Ceramics (第五届先进陶瓷国际研讨会(CICC-5))

会议地点: 长沙

会议语种:英文

页码: 223-225

在线出版日期: 2007-05-10（万方平台首次上网日期，不代表论文的发表时间）