Effects of the Top-electrode Annealing on the Ferroelectric Properties of BiFeO3 Thin Films

摘要：

　　BiFeO3 films were prepared by chemical solution method on Pt/Ti/SiO2/Si substrates.The ferroelectric properties of Pt/BiFeO3/Pt capacitors were investigated,and the effect of recovery annealing applied after Pt top electrode deposition was discussed.The pure phase film with recovery annealing exhibits lower leakage current and higher remanent polarization than those without post-annealing.The leakage current is reduced by three orders of magnitude,the remanent polarization increases from 2.59μC/cm2 to 3.44μC/cm2.The recovery anneals applied after top electrode deposition may optimize the ferroelectric performance by removing the effect of structural defects formed by sputtering.

关键词： BFO MFM Recovery anneal Ferroelectric properties

作者: Shan Liu Jian Li Wei Pan

作者单位: State Key Lab of New Ceramics and Fine Processing,Department of Materials Science and Engineering,Tsinghua University,Beijing 100084,Peoples Republic of China

会议类型: 国际会议

会议名称: The Fifth China International Conference on High-Performance Ceramics (第五届先进陶瓷国际研讨会(CICC-5))

会议地点: 长沙

会议语种:英文

页码: 230-231

在线出版日期: 2007-05-10（万方平台首次上网日期，不代表论文的发表时间）