Synthesis and Characterization of AZO Thin Films by Sol-Gel Process:The Influences of Precursors and Dopants
Transparent ZnO and aluminum-doped zinc oxide (AZO) thin films were prepared via the sol-gel process on glass substrates using an alcoholic non-polyol route and spin-coater technique for film deposition.Zinc acetate,zinc chloride,and aluminum salt used as cations source.All the undoped and doped xerogel films were amorphous and converted into zincite structure after firing at 200 ℃,irrespective of precursor types and dopant amounts.However,the evolution of morphology,microstructure,and texture of the gel films were strongly depended on the precursors and dopants.The films derived from zinc chloride showed strongly preferential (002) orientation,while acetate-derived films exhibited random orientation.On firing at 500 ℃,the visible transmittances of films were 50~92%,depending on the kinds of precursors and dopant contents.
Sol-gel AZO film Textural evolution Precursor
M.T.Tsai H.C.Chang P.J.Tsai
Department of Materials Science and Engineering,National Formosa University,P.O.Box 385 Touliu,Yunli Department of Applied Chemistry,Providence University,Taichung 43301,Taiwan
国际会议
The Fifth China International Conference on High-Performance Ceramics (第五届先进陶瓷国际研讨会(CICC-5))
长沙
英文
326-328
2007-05-10（万方平台首次上网日期，不代表论文的发表时间）