XPS Studies on ZrO2 Thin Films Deposited on Glass Substrate by Sol-Gel

摘要：

　　The chemical composition and the valence state of elements on the surface of ZrO2 thin films deposited on glass substrates have been studied by X-ray photoelectron spectroscopy.Results show that:elements ofNa,Mg,Zr,Ca exist in the form of their respective stable state,such as Na2O,MgO,ZrO2,CaO,when heat treated at 500℃ for 0.5h; but Si is unstable,and exhibit stoichiometrical disturbances.Results of chemical composition and their content by atom percent of ZrO2 thin films surface reveal that:Si,and Ca diffuse from glass to the thin films in scale; Na diffuses few and Mg collects to the thin films surface.The diffusion of Mg2+ and Ca2+ from glass to ZrO2 thin films is negative diffusion.

关键词： XPS ZrO2-CeO2 thin films Sol-gel

作者: Xingang Yu Yi Gong Wenyue Bi Xuechun Tian Hongwen Ma Huifeng Zhao Guohong Qiu Li Wang

作者单位: College of Materials Science and Engineering,Chongqing University,Chongqing,400044,China Department of Material Science,China University of Geosciences Beijing,100083,China Research Institute of Glass and Glass Fiber,China Building Materials Academy Beijing,100024,China

会议类型: 国际会议

会议名称: The Fifth China International Conference on High-Performance Ceramics (第五届先进陶瓷国际研讨会(CICC-5))

会议地点: 长沙

会议语种:英文

页码: 1277-1279

在线出版日期: 2007-05-10（万方平台首次上网日期，不代表论文的发表时间）