An Investigation of Structure and Wear Properties of TiN/NbN Films Deposited by Reactive Magnetron Sputtering
TiN/NbN multilayers on steel substrates (SKD11) are produced using DC magnetron sputtering process.The multilayer obtained are characterized in composition by means of X-ray diffraction techniques,Microhardness and adhesion to the substrate were studied by atomic force microscopy and scratch tests.The morphological analysis and coating structure are studied using scanning electron microscopy,and atomic force microscopy.The film thickness is measured by a stylus profiler (XP-2 stylus profiler).Wear tests were performed on pin-on-disk configuration and dry sliding conditions,at 5N load by using hardened steel ball.On mechanical properties,higher Youngs modulus and hardness values follow to increase the TiN/NbN layers number.The multilayer films of 64 layers at 500℃ 1h annealing indicated that the microhardness and Youngs modulus had the highest values.
TiN/NbN multilayers DC reactive magnetron sputtering wear
Chien-Cheng Liu Weng Min-Hang Chien-Tang-Wang Chen Jheng-Hong Chou Yung-Chih Yaw Huai-Wei
Department of Mechanical Engineering,Kun Shan University,Tainan,Taiwan National Nano Device Laboratories,Tainan,Taiwan
国际会议
The Fifth China International Conference on High-Performance Ceramics (第五届先进陶瓷国际研讨会(CICC-5))
长沙
英文
1310-1312
2007-05-10（万方平台首次上网日期，不代表论文的发表时间）