Li2O-Al2O3-SiO2 Glass-ceramics Used As Anodic Bonding Materials
The glass-ceramics,whose coefficient of thermal expansion approximately matched to that of silicon,were studied to replace conventional heat-resistant glass as substrate material for anodic bonding.The basic glasses of the Li2O-Al2O3-SiO2 system with TiO2 and ZrO2 as nucleation agents were prepared by melting technology,and the temperatures of nucleation and crystallization were determined.The glass-ceramics were obtained by two-step heat-treatment method.The oriented crystallization of glasses in gradient temperature field was studied.The crystal phases and microstructures of glass-ceramics were analyzed.Effect of heat-treatment schedule on the coefficient of thermal expansion was discussed.The results showed that the most of the main crystal phases of the samples were β-spodumene.The coefficient of thermal expansion of sample was about 32.5 × 10-7/℃,which was approach to that of silicon.
Glass-ceramics Li2O-Al2O3-SiO2 Anodic Bonding Coefficient of thermal expansion
Hong Li Yun Du Jinshu Cheng Tianhe Wang
Key Laboratory of Silicate Materials Science and Engineering(Wuhan University of Technology),Ministr The University of Sheffield,34 Barncliffe Road,Fulwood,Sheffield,S104 DF,UK
国际会议
The Fifth China International Conference on High-Performance Ceramics (第五届先进陶瓷国际研讨会(CICC-5))
长沙
英文
1436-1438
2007-05-10（万方平台首次上网日期，不代表论文的发表时间）