Structure Property of Titanium Dioxide Thin Films in Sintered Temperature by the Sol-Gel Method

摘要：

　　Titanium dioxide (TiO2) thin film on glass substrate is fabricated by sol-gel method.The TiO2 film is sintered at various temperatures for investigation on the refraction index and crystallization characteristic.The lower refractive index of the TiO2 thin film is 1.89 when the sintering is performed at the low temperature of 200℃ and the thickness is 448 nm.However,the higher refractive index of 2.55 and chemical stability of the TiO2 film in rutile phase are obtained via sintering temperature at 700℃.

关键词： Sol-gel Refractive index Sintering

作者: Chien-Jung Huang Kuo-Chien Liao Yan-Kuin Su

作者单位: Department of Applied Physics,National University of Kaohsiung,＃700 Kaohsiung University Rd.,Nan-Tzu Institute of Electro-Optical Engineering,National Sun Yat-Sen University,70 Lien-hai Rd.,Kaohsiung 8 Institute of Electro-Optical Engineering,National Sun Yat-Sen University,70 Lien-hai Rd.,Kaohsiung 8

会议类型: 国际会议

会议名称: The Fifth China International Conference on High-Performance Ceramics (第五届先进陶瓷国际研讨会(CICC-5))

会议地点: 长沙

会议语种:英文

页码: 1465-1467

在线出版日期: 2007-05-10（万方平台首次上网日期，不代表论文的发表时间）