Sensitivity analysis of MEMS fiber optic Displacement Sensor

摘要：

　　A new theory model about fiber optic sensor used single-mode optical fiber is introduced.It contains a configuration of SMF to transmit and receive light,optical lens to collimate,MEMS membrane to be compatible with vibration displacement.Because of the Gaussian spot-size mismatch of single-mode collimator is related with misalignment of insert separation,lateral offset,angular tilt,through the Gaussian spot-size mismatch between incident beam and receiving beam,and based on the analysis of static performance of several sizes of membranes,we can get the related parameters about the sensitivity of fiber optic sensor.From simulation results,we can see clearly that the proper values of parameters can make the sensitivity of sensor improve in orders of magnitude than traditional algorithm.

关键词： optic sensor sensitivity membrane

作者: Li Xiaolong Wang Jiangan

作者单位: Electronic Engineering Institute Naval University of Engineering Wuhan, China, 430033

会议类型: 国际会议

会议名称: 2012 IEEE 14th International Conference on Communication Technology(2012年第十四届通信技术国际会议(ICCT 2012))

会议地点: 成都

会议语种:英文

页码: 989-992

在线出版日期: 2012-11-09（万方平台首次上网日期，不代表论文的发表时间）