On the Test Method of Dynamic Characteristics of MEMS Components
The paper develops a small split Hopkinson pressure/tensile bar apparatus (SSHPB/SSHTB) for the purpose to study the dynamic characteristics of the MEMS materials and MEMS components.The dynamic characteristics of MEMS nickel material and planar S-form microspring are got by using it.The dynamic Young’s modulus of LIGA nickel got by the SSHPB under the strain rate of 2×103s-1 is about 250GPa,which is slightly higher than that got under static condition.The deformation peculiarity of the planar S-form microspring is also got by the SSHTB,which is uneven due to the stress wave spreading in the microspring.The result of the paper is valuable for providing feasible directions to the optimization design and manufacture of the MEMS components.
MEMS components dynamic mechanical characteristics small split Hopkinson pressure/tensile bar apparatus high speed image collection.
Wang Ya-jun He Guang
School of Mechatronical Engineering, Beijing Institute of Technology, Beijing 100081, China
国际会议
中国微米纳米技术学会第14届学术年会、第3届国际年会暨第6届微米纳米技术“创新与产业化国际研讨与展览会(CSMNT2012 & ICMAN2012)
杭州
英文
1-6
2012-11-04（万方平台首次上网日期，不代表论文的发表时间）