Design and Analysis of a Novel Biaxial Piezoelectric Micro-Gyroscope
Despite the popularity of piezoelectric vibratory micro-gyroscope in the past decades for their small size,low cost,batch fabrication and energy efficient,most of them can only detect single axis angular rate.In this paper,a novel biaxial piezoelectric micro-gyroscope fabricated with PZT wafer is proposed.To acquire two-axial angular rate sensing,a bouncing mode of the vibrator is utilized as the drive mode and two rocking modes are used as the sense modes.PZT is used as the vibration body instead of transducer,which enhances the drive and sense efficiency of the sensor.In this paper,the structure and working principle of the novel biaxial piezoelectric micro-gyroscope are introduced firstly.In addition,modal analysis has been made to research the voltage distribution of the piezoelectric vibrator and the drive and sense electrodes of the gyroscope are designed.By the optimization design of the proof mass,the frequency split between the drive mode (bouncing mode) and sense modes (rocking modes) is reduced and the sensitivity of the gyroscope is improved.With the optimized structure,harmonic analysis has been made to research the Coriolis Effect of the gyroscope.The data get from the harmonic analysis is demodulated by Matlab and the sensitivity is given.The simulation results verify the principle of the novel biaxial piezoelectric micro-gyroscope.
Micro-gyroscope piezoelectric biaxial sense MEMS proof mass
Ran Guan Weiping Zhang Gong Zhang Yuxiang Cheng Wenyuan Chen Xiaosheng Wu Feng Cui Wu Liu
Science and Technology on Micro/Nano Fabrication Laboratory, Research Institute of Micro/Nano Science and Technology, Shanghai Jiao Tong University, Shanghai 200240,People’s Republic of China
国际会议
中国微米纳米技术学会第14届学术年会、第3届国际年会暨第6届微米纳米技术“创新与产业化国际研讨与展览会(CSMNT2012 & ICMAN2012)
杭州
英文
1-4
2012-11-04（万方平台首次上网日期，不代表论文的发表时间）