Fabrication of the nanoscale flat-bottomed and lamellar structures on HOPG surface by STM-based electric lithography

摘要：

　　The requirement for fabrication of the nanometer-scale structures has grown up recently due to the advance in the development of the nanoscale electronic-devices or bio-devices.Scanning tunneling microscope (STM)-based electric lithography is one of the potential fabrication approaches to produce nanoscale structures on a variety of materials.This study of the STM-based electric lithography intends to fabricate flat-bottomed and lamellar structures on the graphite surface,which differs from the conventionally fabricated tapered structures.The formation and the comparison of both the lamellar and tapered structures are obtained by applying distinct STM tip geometries in the STM-based electric lithography.On the basis of the experimental results,it is found that the formation of lamellar structures should be attributed to the local electrochemical reaction,while the generation of tapered structures is resulted from the dielectric breakdown in the tip-sample gap.

关键词： STM-based electric lithography nanofabrication, modification of graphite surface electrochemical reaction dielectric breakdown and spark

作者: Ye Yang Wansheng Zhao

作者单位: The State Key Laboratory of Mechanical System and Vibration, School of Mechanical Engineering,Shanghai Jiao Tong University, Shanghai 200240, CHINA

会议类型: 国际会议

会议名称: 中国微米纳米技术学会第14届学术年会、第3届国际年会暨第6届微米纳米技术“创新与产业化国际研讨与展览会(CSMNT2012 & ICMAN2012)

会议地点: 杭州

会议语种:英文

页码: 1-6

在线出版日期: 2012-11-04（万方平台首次上网日期，不代表论文的发表时间）