Immune PI controller on magnetic levitating Ultra precision stage

摘要：

　　MLUPS functions without contact or friction.With the large current power,mcu control core,laser interferometer position feedback,the stage meets the precision requirements hardware.The positioning system includes two-level positioning system—one-phase coarse positioning and two-phase fine positioning.Based on mathematical model,the immune PI controller is proposed in terms of magnetic edge effect,current harmonic and nonlinear characteristics of magnetic field.By designing target function,antigen affinity,antibodies affinity,mutation,immune algorithm optimizes parameters and memory cells.The stage working range is 10mm,the simulation result shows that the positioning precision is ±10 nm; the positioning time is 50 ms.The stage has a good performance in robustness.

关键词： Magnetic levitating ultra precision stage (MLUPS) immune PI two-level positioning system

作者: Xuepeng Liu Xiaohong Hao Dongsheng Zhang Bin Wang

作者单位: Zhongshan Polytechnic, China;Xi’an Jiaotong University, China University of electronic science and technology, China Xi’an Jiaotong University, China Jiaxing University, China

会议类型: 国际会议

会议名称: 中国微米纳米技术学会第14届学术年会、第3届国际年会暨第6届微米纳米技术“创新与产业化国际研讨与展览会(CSMNT2012 & ICMAN2012)

会议地点: 杭州

会议语种:英文

页码: 1-5

在线出版日期: 2012-11-04（万方平台首次上网日期，不代表论文的发表时间）