Drive-Mode Control for a MEMS Gyroscope Based on Active Disturbance Compensation

摘要：

　　This paper proposes a novel design of oscillation loop based on active disturbance compensation for MEMS gyroscope operating at atmospheric pressure.The proposed control algorithm can drive the drive axis of the gyroscope to resonance at a fixed frequency and regulate the output amplitude of the axis to a fixed level by compensating the internal dynamic disturbance in real time.The averaging method is used to analyze the stability of the control system while experiments are established to demonstrate the effectiveness of the control algorithm.The resulting overall performance of the gyroscope is tested under atmospheric pressure.

关键词： MEMS gyroscope drive mode active disturbance compensation adaptive control

作者: Huijie Zhu Yidong Liu Shichang Hu Zhonghe Jin

作者单位: Micro-Satellite Research Center, Zhejiang University, Hangzhou 310027, P. R. China

会议类型: 国际会议

会议名称: 中国微米纳米技术学会第14届学术年会、第3届国际年会暨第6届微米纳米技术“创新与产业化国际研讨与展览会(CSMNT2012 & ICMAN2012)

会议地点: 杭州

会议语种:英文

页码: 1-6

在线出版日期: 2012-11-04（万方平台首次上网日期，不代表论文的发表时间）