Anovel Silicon Micro-gyroscope Array
This paper presents the structure design,modal simulation,closed-loop control,data fusion,and experimental results of a novel silicon micro-gyroscope array.Based on a numerical model of thermoelastic damping,a new quad-cell structure is designed by using structure-decoupled method.The driving and sensing modes are simulated using ANSYS.The simulation results show that the gyroscope array has four modal types in the driving mode and sensing mode.Digital phase-locked loop and digital closed-loop control methods based on electrostatic force feedback are adopted in con trol circuits.The testing results demonstrate that the relative deviation of the oscillating amplitude is 9 × 10 - 5.Based on the noise model,Kalman filter is built to obtain the optimal estimation of the gyroscope arrays output.By the data fusion,the bias stability of the gyroscope array can be improved 20 times.
silicon micro-gyroscope array ansys simulation automatic gain control multisensor information fusion kalman filter
Zhang Yinqiang Ji xunsheng Yang bo Li jing Wang Shourong
Key Laboratory of Micro-Inertial Instrument and Advanced Navigation Technology, Ministry ofEducation School of Communication and Control Engineering, Jiangnan University, Wuxi, Jiangsu, China Key Laboratory of Micro-Inertial Instrument and Advanced Navigation Technology, Ministry of Educatio
国际会议
中国微米纳米技术学会第14届学术年会、第3届国际年会暨第6届微米纳米技术“创新与产业化国际研讨与展览会(CSMNT2012 & ICMAN2012)
杭州
英文
1-6
2012-11-04（万方平台首次上网日期，不代表论文的发表时间）