A novenovel flexible shear stress sensor array with double hot-wires based on MEMS
Design,production and calibration of a novel flexible shear stress sensor array with double hot-wire based on MEMS are presented in this paper,which can be applied to measure the surface shear stress of air craft or underwater vehicles.The sensor array is successfully fabricated by MEMS process,the electrical bond pads of which are located at the backside,thus greatly reducing the interference of the measured flow filed.The calibration has been carried out in the wind tunnel experiment,and the value of calibration factor is 8.35mV/ (m/s) in a flow velocity range from 0 to 35 m/s.The results of test experiments prove that the shear sensor array is well capable of measuring the flow velocity of boundary layer.
flexible sensor array double hot-wires electrical bond pads on backside MEMS process
Yongming Sun Wu Liu Honghai Chen Weiping Zhang Wenyuan Chen Feng Cui Xiaosheng Wu
Science and Technology on Micro/Nano Fabrication Laboratory,Research Institute of Mico/Nano Science Science and Technology on Micro/Nano Fabrication Laboratory,Research Institute ofMico/Nano Science a
国际会议
中国微米纳米技术学会第14届学术年会、第3届国际年会暨第6届微米纳米技术“创新与产业化国际研讨与展览会(CSMNT2012 & ICMAN2012)
杭州
英文
1-5
2012-11-04（万方平台首次上网日期，不代表论文的发表时间）