Measurement Combination of X&Y-axis Accelerations and Z-axis Angular Velocity in a Slot-structure Resonator

摘要：

　　A slot-structure resonator comprised of two orthogonal accelerometers is presented.The device detects the x&y-axis accelerations and the z-axis angular velocity at the same time.Variable-area sensing is adopted because of its good linearity and quick response.The resonant frequencies of the x&y-axis accelerometers are 1.9315 kHz and 1.8403 kHz,respectively.The x-axis accelerometer is driven into resonance.The y-axis accelerometer moves together with the x-axis accelerometer and oscillates along y-axis caused by z-axis angular velocity.The equilibrium positions of the accelerometers change with the corresponding x&y-axis accelerations.The test results show a sensitivity of 16mV/o/s in response to the z-axis angular velocity,49mV/g and 244mV/g in response to the x and y-axis acceleration,respectively.The noise of the angular velocity output is 0.0138o/s/√Hz,0.42mg/√Hz and 0.074mg/√Hz for the x and y-axis accelerometer,respectively.

关键词： slot-structure accelerometer gyroscope

作者: Shichang Hu Huijie Zhu Mingjun Ma Yidong Liu Zhonghe Jin

作者单位: Micro-Satellite Research Center, Zhejiang University, Hangzhou, China

会议类型: 国际会议

会议名称: 中国微米纳米技术学会第14届学术年会、第3届国际年会暨第6届微米纳米技术“创新与产业化国际研讨与展览会(CSMNT2012 & ICMAN2012)

会议地点: 杭州

会议语种:英文

页码: 1-5

在线出版日期: 2012-11-04（万方平台首次上网日期，不代表论文的发表时间）