Microfabrication of Alkali Metal Vapor Cells with Buffer Gas and Paraffin Coating for MEMS Atomic Devices
This paper reports on the Si-glass anodic bonding process to fabricate alkali metal vapor cells filled with a buffer gas (N2) at a controlled pressure (up to 1atm) and coated by paraffin wax for application in MEMS atomic devices.The two-step anodic bonding process was proposed to improve the bonding quality at a lower temperature than paraffin flash point (198℃).In the first bonding step,alkali metal and buffer gas was pre-sealed in micro vapor cells,which carried out in the presence of micro-scale alkali metal packets and buffer gas at a controlled pressure by applying a lower voltage than the electrical breakdown caused by ionization of buffer gas.Alkali metal was introduced into the microcells by the micro-scale packets which encapsulated the alkali metal with inert paraffin wax by the bulk micromachining technologies.Subsequently,the second bonding step was performed in air at the atmospheric pressure at sufficiently high voltages to improve the sealing quality.By employing high-power laser source to release the alkali metal vapor from the wax packaging,a uniform thin paraffin wall coating was formed on the bare silicon walls to increase the lifetime of the polarized atoms which collided with the coating before depolarization.Helium mass spectrometer would be used to monitor the cell pressure,and the absorption optical spectroscopy of the 87Rb D1 line at 795nm in 1mm3 cells would be demonstrated experimentally in the next work.
anodic bonding atomic vapor cells MEMS atomic devices alkali metal packets
You Zheng Ma Bo Ruan Yong Zhang Gaofei Chen Shuo
Department of Precision Instrument and Methnology, Tsinghua University, Beijing 100084, China
国际会议
中国微米纳米技术学会第14届学术年会、第3届国际年会暨第6届微米纳米技术“创新与产业化国际研讨与展览会(CSMNT2012 & ICMAN2012)
杭州
英文
1-7
2012-11-04（万方平台首次上网日期，不代表论文的发表时间）