The effect of Casimir force to the performance of the micro-accelerometer

摘要：

　　Casimir had measured the Casimir force through experimental methods,and fitted the empirical formula between the plates.On its basis we analyse that when the gap of two separating surfaces achieves submicron in micro devices,the effect of the Casimir force to the micro-devices is great and this Casimir effect can not be ignored.The results show that: Considering the Casimir force or not,the extreme value of acceleration which can be detected by micro-accelerometer is different,and we have got the specific numerical fitting figure by Matlab.

关键词： Casimir force micro-accelerometer

作者: Li Shen Shiqiao Gao Yanwei Guan

作者单位: State Key Laboratory of Explosion Science and Technology, Beijing Institute of Technology, Beijing , State Key Laboratory of Explosion Science and Technology, Beijing Institute ofTechnology, Beijing ,

会议类型: 国际会议

会议名称: 中国微米纳米技术学会第14届学术年会、第3届国际年会暨第6届微米纳米技术“创新与产业化国际研讨与展览会(CSMNT2012 & ICMAN2012)

会议地点: 杭州

会议语种:英文

页码: 1-5

在线出版日期: 2012-11-04（万方平台首次上网日期，不代表论文的发表时间）