Design of an Array Bionic Vector Vibration sensor based on MEMS

摘要：

　　In the process of a physical procedure,more than one vibration signals should be measured,whose value and frequency are in a wide range.Therefore,in such a situation,a single sensor can hardly meet the testing requirement.To solve this kind of problems,a kind of aligned array MEMS bionic vector vibration sensor is proposed.This aligned array vibration sensor consists of four micro-structure sensors and the testing ranges are 10g,100g,500g,and 1000g.On the basis of the mathematical model,the array sensing unit was simulated by ANSYS.The test was presented at last.The experiment results show that both the two direction of the aligned array vibration sensor have high sensitivity,good linearity and good output stability.The sensitivity of the X direction is 2.6134mv/g and Y is 2.5563mv/g,the linearity of X direction is 0.99991and Y is 0.99968.

关键词： MEMS Array Vibration Sensor

作者: LIU Lin-Xian ZHANG Guo-Jun ZHANG Wen-Dong

作者单位: Key Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education,North University of China, Taiyuan 030051, China

会议类型: 国际会议

会议名称: 中国微米纳米技术学会第14届学术年会、第3届国际年会暨第6届微米纳米技术“创新与产业化国际研讨与展览会(CSMNT2012 & ICMAN2012)

会议地点: 杭州

会议语种:英文

页码: 1-4

在线出版日期: 2012-11-04（万方平台首次上网日期，不代表论文的发表时间）