The Heat Transfer Characteristics of Serpentine Channel Heat Sink - A Combined Experimental-Computational Approach

摘要：

　　Ultraprecision and fast positioning is the key to the next generation lithography equipment-planar motor.To achieve these goals,temperature control must be performed because the rising temperature of the planar motor and environment will affect the measurement accuracy of the laser interferometers significantly,thus affecting the position precision of the planar motor.In this paper,a water-cooled serpentine channel heat sink is designed to make the temperature of the planar motor in an appropriate range.Firstly,the thermal resistance network model is proposed to estimate the heat transfer characteristics.Secondly,the experiment setup is established to validate the theoretical analysis.And the results showed that the thermal resistance network model is valid to describe the thermal transfer characteristics of serpentine channel heat sink.

关键词： integrated circuits serpentine channel heat transfer

作者: Hao Xiaohong Liu Yajun Li Xuekang Hou Qiong Peng Bei

作者单位: Department of Mechatronics Engineering, University of Electronic Science and Technology of China, Ch Department of Mechatronics Engineering, University of Electronic Science and Technology ofChina, Che

会议类型: 国际会议

会议名称: 中国微米纳米技术学会第14届学术年会、第3届国际年会暨第6届微米纳米技术“创新与产业化国际研讨与展览会(CSMNT2012 & ICMAN2012)

会议地点: 杭州

会议语种:英文

页码: 1-6

在线出版日期: 2012-11-04（万方平台首次上网日期，不代表论文的发表时间）