A MEMS Piezoelectric Cantilever Beam Array for Vibration Energy Harvesting

摘要：

　　A micro piezoelectric cantilever beam array is designed for vibration energy harvesting.A single degree of freedom analytical model is developed to predict the properties of the device and is verified by finite element method.The piezoelectric material Aluminum Nitride was chosen for the compatibility with the CMOS process.The devices consisting of 5 piezoelectric cantilever beams and one proof mass were fabricated using micromachining technology.The resonance frequency,voltage and power were tested at excitation acceleration of 5.0g.The maximum output power of the device is 9.13 μW at the resonance frequency of 1315 Hz when piezoelectric beams are connected in parallel.

关键词： piezoelectric vibration energy harvesting, single degree of freedom MEMS devices

作者: Xingqiang ZHAO Zhiyu WEN Licheng DENG Guoxi LUO Zhengguo SHANG Dongling LI

作者单位: Key Laboratory of Fundamental Science on Micro/Nano-Device and System Technology,Chongqing University, Chongqing 400030, CHINA;National Center for International Research of Micro/Nano-System and New Material Technology,Chongqing University, Chongqing 400030, CHINA;Microsystem Research Center of Chongqing University, Chongqing 400030, CHINA

会议类型: 国际会议

会议名称: 中国微米纳米技术学会第14届学术年会、第3届国际年会暨第6届微米纳米技术“创新与产业化国际研讨与展览会(CSMNT2012 & ICMAN2012)

会议地点: 杭州

会议语种:英文

页码: 1-6

在线出版日期: 2012-11-04（万方平台首次上网日期，不代表论文的发表时间）