Antireflection Characteristics of Inverted Nanopyramid Arrays Fabricated by Low-cost NSL Technology

摘要：

　　A simple and effective process based on NSL for the fabrication of periodic inverted nanopyramid structure was presented in this paper.The prepared nanostructure has almost a drop of 40% in the average reflectance at normal incidence,when compared with its corresponding bare silicon surface.Moreover,we obtained the reflection spectra for bare silicon substrate and prepared nanostructure through experiments and numerical caculations and the results agreed well with each other,respectively.So we can combine the simulation method and fabrication method together to optimize the nano-structured antireflection coatings for better antireflection characteristics and this methodology is robust and promising for the development of crystalline silicon solar cells.

关键词： Nanopyramid Antireflection NSL FDTD Solar cell

作者: Junfeng Wang Peitao Dong Di Di Jian Chen Chaoguang Wang Haoxu Wang Xuezhong Wu

作者单位: College of Mechatronics Engineering and Automation, National University of Defense Technology,Changsha, Hunan, 410073, P. R. China

会议类型: 国际会议

会议名称: 中国微米纳米技术学会第14届学术年会、第3届国际年会暨第6届微米纳米技术“创新与产业化国际研讨与展览会(CSMNT2012 & ICMAN2012)

会议地点: 杭州

会议语种:英文

页码: 1-5

在线出版日期: 2012-11-04（万方平台首次上网日期，不代表论文的发表时间）