Fabrication and simulation of micro dynamically tuning gyroscope

摘要：

　　A novel micro dynamically tuning gyroscope (MDTG) is presented in detail.First,the modal simulation and the optimized structure parameters are given,which can provide the reference for the mask design of the rotor and electrode plates.Then the process flow of the wafer rotor and electrode plates are described in detail,respectively.For the rotor fabrication,the dual side photolithograph alignment technology is utilized to make both sides symmetrical and direct through enough.And for the electrode plates fabrication,the key lift-off technology of gold is utilized to make the precision deposition area and fine boundary while the Cr is used as the adhension layer.All the SEM photos show that the fabrication process is effective and optimized.Last the digitalized closed-loop measurement circuit are simulated.The discrete correction and decoupling modules are designed to make the closed-loop stable and cross-coupling effect small.The closed-loop system bandwidths can reach more than 60Hz and the two-axis scale factors are completely symmetrical.All the simulation results demonstrate the proposed fabrication of the MDTG can achieve the application requirement.

关键词： micro dynamically tuning gyroscope wafer rotor equilibrium ring electrode plates torsional spring

作者: Dunzhu Xia Cheng Yu Shourong Wang Hongsheng Li

作者单位: Key laboratory for Micro-inertial Instrument and Advanced Navigation Technology of Education Ministry,Southeast University, Nanjing 210096

会议类型: 国际会议

会议名称: 中国微米纳米技术学会第14届学术年会、第3届国际年会暨第6届微米纳米技术“创新与产业化国际研讨与展览会(CSMNT2012 & ICMAN2012)

会议地点: 杭州

会议语种:英文

页码: 1-6

在线出版日期: 2012-11-04（万方平台首次上网日期，不代表论文的发表时间）