Introduction of MEMS Platforms for Research and Pilot Production in Suzhou

摘要：

　　In this presentation,I will introduce two MEMS platforms located in Suzhou Industrial Park.The first one is Nanofabrication platform in Suzhou Institute of Nano-Tech and Nano-Bionics,Chinese Academy of Science.The second is MEMS pilot production line from Suzhou Nanotech Co.The history,functions,capabilities,and outlook for each platform will be presented.

作者: Wenjiang Shen

作者单位: Chinese Academy of Science,Suzhou,China

会议类型: 国际会议

会议名称: 中国微米纳米技术学会第14届学术年会、第3届国际年会暨第6届微米纳米技术“创新与产业化国际研讨与展览会(CSMNT2012 & ICMAN2012)

会议地点: 杭州

会议语种:英文

页码: 1-1

在线出版日期: 2012-11-04（万方平台首次上网日期，不代表论文的发表时间）