Research of SPR Phase Detection for Measuring Ultra Thin Metal Film

摘要：

　　SPR phase detection method is adopted in this paper to measure the thickness of nanometer scale metal film.It provided a novel means to calculate the value of thickness through figuring up the relative offset of interference fringes with the TM-polarized and TE-polarized wave reflected from the prism which is covered by a film-substrate step.Simulation results are presented out to illustrate the relations between phase variation and metal film thickness.This method is succeeded in measuring the target metal film with nominal thickness 50 nm and the average measurement value is 50.02 nm.The standard deviation is 0.41 nm and the maximum repeatability error is 0.90 nm.

关键词： SPR effect phase detection metal film thickness nanometer interference

作者: Liu Chao Liu Qing-gang Li Ting-ting

作者单位: State Key Lab of Precision Measurement Technology and Instruments, Tianjin University, Tianjin,30072, China

会议类型: 国际会议

会议名称: 中国微米纳米技术学会第14届学术年会、第3届国际年会暨第6届微米纳米技术“创新与产业化国际研讨与展览会(CSMNT2012 & ICMAN2012)

会议地点: 杭州

会议语种:英文

页码: 1-6

在线出版日期: 2012-11-04（万方平台首次上网日期，不代表论文的发表时间）