Dynamics Research on Electron-Stimulated Desorption of Fluorine from Fluorinated Graphene Surface
The experiment of stimulating fluorine to desorb from fluorinated graphene was carried out in order to make clear the dynamical mechanism of the electron-stimulated desorption (ESD) of fluorine.X-ray photoelectron spectroscopy (XPS) with an electron beam gun accessory was used not only to stimulate fluorine to desorb,but also to characterize the concentration of fluorine after ESD.The concentration of fluorine dropped quickly following electron beam irritation.The desorption cross section of fluorine is about 1.5×10-17 cm2.It was also found that electron beam with low current density did not damage the structure of fluorinated graphene.These results confirm that it is feasible to fabricate all graphene electronics by ESD technology.
Fluorinated graphene ESD Dynamical mechanism
Lei Guo Xuekang Chen Lanxi Wang Shengzhu Cao Xiaohang Bai Chao Zhang Yongmin He Hui Gao
Science and Technology on Surface Engineering Laboratory, Lanzhou Institute of Physics, P. O. Box 94 School of Physical Science and Technology, Lanzhou University, Tianshui Road 222,730000 Lanzhou, Chi
国际会议
中国微米纳米技术学会第14届学术年会、第3届国际年会暨第6届微米纳米技术“创新与产业化国际研讨与展览会(CSMNT2012 & ICMAN2012)
杭州
英文
1-6
2012-11-04（万方平台首次上网日期，不代表论文的发表时间）