DevelopmenDevelopment of a Nanomanipualtion System for Handling Nanowires
A compact and versatile nanomanipulation platform and its dirve-control system are being developed.This nanomanipulation sytem is aimed to handle nanowires (NWs) and fabricate nanostructures by NWs in a Scanning Electron Microscope (SEM).The excellent performance of the compact manipulator developed with corase and fine positioning in one unit has been demonstrated,which shows that the resolution is 8 nm and the steps are from 50 nm to 0.8 μm.For the power supply of the manipulator,a three-output driver is designed with a high-power integrated operational amplifier based on a mixed approach of voltage control and current control.The planar push-and-lift handling of NWs is carried out by the use of two tips to demonstrate the capability of the nanomanipulation sytem inside SEM.
nanopositioner nanowire amplifier nanohandling
Shizhong Zhang Weibin Rong Lining Sun
State Key Laboratory of Robotics and System, Robotics Institute, Harbin Institute of Technology, Har MOE Key Laboratory of Micro-systems and Micro-structures Manufacturing, Harbin Institute of Technolo
国际会议
中国微米纳米技术学会第14届学术年会、第3届国际年会暨第6届微米纳米技术“创新与产业化国际研讨与展览会(CSMNT2012 & ICMAN2012)
杭州
英文
1-6
2012-11-04（万方平台首次上网日期，不代表论文的发表时间）