Accuracy Analysis of Quality Factor Measurement Based on Time Domain Method for MEMS Resonators

摘要：

　　To reduce the measurement cost and time,a time domain measurement method of quality factor for MEMS resonator is presented in this paper.The relation curve between quality factor and vacuum level is obtained.The results indicate that measurement error is larger under high vacuum level when the sampling frequency is lower.The reason causing the error is analyzed and measurement precision is improved by increasing the sampling frequency.The measure results indicate time domain measurement is advisable and improvable for MEMS resonator measurement.

关键词： MEMS resonators quality factor vacuum level time domain measurement precision analysis

作者: Lingyun Wang Xiaohui Du Yuanzhe Su Jie He Yipan Li Dezhi Wu Daoheng Sun

作者单位: Dept. of Mechanical and Electrical Engineering, Xiamen Univ., 422th Siming South Road, Xiamen,China. P.C.：361005

会议类型: 国际会议

会议名称: 中国微米纳米技术学会第14届学术年会、第3届国际年会暨第6届微米纳米技术“创新与产业化国际研讨与展览会(CSMNT2012 & ICMAN2012)

会议地点: 杭州

会议语种:英文

页码: 1-7

在线出版日期: 2012-11-04（万方平台首次上网日期，不代表论文的发表时间）