Three-dimensional Reconstruction Techniques Based on One Signal SEM Image

摘要：

　　This paper proposed a method to reconstruct the three-dimensional topography of the silicon surface.By modeling the imaging principle of scanning electron microscope,this method can use only one signal scanning electron microscope image to get the 3D information of the silicon surface and is very easy to implement.Then this paper tested the reconstruction result,and the test results showed this method works well.

关键词： 3D-reconstruction MEMS scanning electron microscope (SEM) silicon surface

作者: Wang Qiqi Zhu Fuyun Sun Mingzhu Zhang Haixia Zhao Xin

作者单位: Institute of Robotics and Automatic Information System, Nankai University, Tianjin, CHINA National Key Laboratory of Nano/Micro Fabrication Technology, Institute of Microelectronics,Peking U

会议类型: 国际会议

会议名称: 中国微米纳米技术学会第14届学术年会、第3届国际年会暨第6届微米纳米技术“创新与产业化国际研讨与展览会(CSMNT2012 & ICMAN2012)

会议地点: 杭州

会议语种:英文

页码: 1-5

在线出版日期: 2012-11-04（万方平台首次上网日期，不代表论文的发表时间）