Flexible ZnO thin film SAW device on polyimide substrate
In this paper,we report the first development of surface acoustic wave (SAW) devices on flexible polyimide substrates as SAW devices can be used not only as filters,duplexers etc in electronics but also as very effective actuators for microfluidics and lab-on-a-chip and as sensors for detection of traces of biomolecules for early stage diagnosis etc.The ZnO layers were deposited by sputtering process with dominant (002) crystal orientation and small surface roughness.The fabricated SAW devices have good transmission properties,and the resonance frequency and phase velocity increase with the decrease of wavelength.A resonant frequency f0 of 268 MHz,acoustic phase velocity vp of 2144 m/s and K2 of 1.1 % were achieved for the devices with a ZnO layer of 4 μm and wavelength of 8 μm.The acoustic velocity in the ZnO layer also increases with the increase of the ZnO thickness as the influence of the substrate decreases with the increase of the PE-layer.
flexible substrate ZnO thin film flexible SAW device
J.Zhou X.L.He H.Jin S.R.Dong X.H.Shen D.M.Wang J.K.Luo
Dept. Info. Sci. & Electron. Eng., Zhejiang University, Hangzhou 310027, China
国际会议
中国微米纳米技术学会第14届学术年会、第3届国际年会暨第6届微米纳米技术“创新与产业化国际研讨与展览会(CSMNT2012 & ICMAN2012)
杭州
英文
1-4
2012-11-04（万方平台首次上网日期，不代表论文的发表时间）