A Sub 0.8 Degree per Hour Mode-matching MEMS Vibratory Gyroscope with Closed Loop Control for the Sense Mode

摘要：

　　A detailed analysis about the nonlinearity of a mode-matching MEMS vibratory gyroscope is presented in this paper,then closed loop control for the sense mode is adopted to improved the performances.Experimental results figure out that the mode-matching gyroscope with closed loop controlled sense mode achieves a scale factor of 65mV/deg/s with nonlinearity of 0.05% and asymmetry of 0.1%,and a bias instability of 0.77deg/h,while they are 60mV/deg/s,1%,4.6% and 9.8deg/h in the open loop controlled sense mode system,respectively.These performances can be improved by more than one order of magnitude in the closed loop control system.

关键词： MEMS vibratory gyroscope mode-matching closed loop control nonlinearity

作者: Chunhua He Chunhua He Dachuan Liu Zhenchuan Yang Guizhen Yan

作者单位: Institute of Microelectronics, Peking University, Beijing 100871, P. R. China

会议类型: 国际会议

会议名称: 中国微米纳米技术学会第14届学术年会、第3届国际年会暨第6届微米纳米技术“创新与产业化国际研讨与展览会(CSMNT2012 & ICMAN2012)

会议地点: 杭州

会议语种:英文

页码: 1-5

在线出版日期: 2012-11-04（万方平台首次上网日期，不代表论文的发表时间）