MEMS based Micro-electromagnetic vibration energy harvester

摘要：

　　We developed a simple and efficient micro electromagnetic energy harvester based on MEMS technology.Processes of electromagnetic vibration energy harvesters for the presence of the magnet,the compatibility with the MEMS processing is not good.Therefore,we have adopted a method of micro-assembly production energy harvester.The energy harvester mainly consists of a resonator chip processed by MEMS and a winding coil.The total volume of the energy harvesters is 0.96 cm3.Test results show that: the energy harvester generated a maximum load power 116.64μW across 400Ω load at 291.4 Hz for an acceleration of 0.5 g after the optimization of the parameters.

关键词： Energy harvesting from vibrations electromagnetic induction resonantor chip MEMS

作者: Yi-ming Lei Li Chen Zhi-yu Wen

作者单位: Key Laboratory of Fundamental Science on Micro/Nano-Device and SystemTechnology ,Chongqing University;National Center for International Research of Micro/Nano-System and New MaterialTechnology,Chongqing University;Microsystem Research Center of Chongqing University, Chongqing 400030, CHINA

会议类型: 国际会议

会议名称: 中国微米纳米技术学会第14届学术年会、第3届国际年会暨第6届微米纳米技术“创新与产业化国际研讨与展览会(CSMNT2012 & ICMAN2012)

会议地点: 杭州

会议语种:英文

页码: 1-6

在线出版日期: 2012-11-04（万方平台首次上网日期，不代表论文的发表时间）