Design of a new type of displacement and angle simultaneous measurement system

摘要：

　　For the abbe declination error that is produced by cantilever moving,a new type of angle and displacement simultaneous measurement system is produced.First,on the basis of the Michelson principle,the angle can be converted to the displacement which reflects change of optical path difference by changing the optical path.Secondly,by promoting the flexure hinge with PZT (piezoelectric ceramic),the interference fringes will produce steady periodicity movement.Finally,by using the method for 4-fold-frequency subdivision and direction judgment,the experiment that receives and processes the dynamic fringes shows that when the stripe width is in the appropriate value,the system meets the requirements for the precision measurement of the abbe declination.

关键词： Abbe declination simultaneously measurement interference fringes

作者: Xuanze Wang Yi Wang Zhongsheng Zhai

作者单位: School of Mechanical Engineering, Hubei University of Technology, Wuhan, China

会议类型: 国际会议

会议名称: 中国微米纳米技术学会第14届学术年会、第3届国际年会暨第6届微米纳米技术“创新与产业化国际研讨与展览会(CSMNT2012 & ICMAN2012)

会议地点: 杭州

会议语种:英文

页码: 1-6

在线出版日期: 2012-11-04（万方平台首次上网日期，不代表论文的发表时间）