Fiber Optic Fabry-Perot Hydrophone with Hydrostatic Pressure Compensation

摘要：

　　A novel fiber optic Fabry-Perot hydrophone with hydrostatic pressure compensation is presented.A polyimide diaphragm attached on the end of an ABS tube is used as the sensing element.A pair of grooves is fabricated on an inner ABS tube to connect the Fabry-Perot cavity with the outside environment,which makes the hydrophone hydrostatic pressure compensated.The polyimide diaphragm-based sensor’s operation principle,design and testing are described.Experiment results show that it has not only high stability in different hydrostatic pressures,but also flat frequency response of about 158 dB ± 3 dB within 300 Hz ~ 3000 Hz.

关键词： fiber optic hydrophone Fabry-Perot interferometer acoustic pressure, hydrostatic pressure compensation polyimide diaphragm

作者: Zhaogang Wang Wentao Zhang Fang Li

作者单位: Optoelectronics System Laboratory, Institute of Semiconductors, China Academy of Sciences,Beijing 100083, China

会议类型: 国际会议

会议名称: 中国微米纳米技术学会第14届学术年会、第3届国际年会暨第6届微米纳米技术“创新与产业化国际研讨与展览会(CSMNT2012 & ICMAN2012)

会议地点: 杭州

会议语种:英文

页码: 1-5

在线出版日期: 2012-11-04（万方平台首次上网日期，不代表论文的发表时间）