Study of piezo-induced surface vibration in solids using atomic force probe
Piezo-induced surface vibrations in solids with nanometer amplitude are detected and analyzed.The vibrations are excited by the piezo element using a PZT component,which attached to the target material and controlled by a signal generator.The detections of such vibrations are carried out using the atomic force probe (AFP).The AFP is a very sensitive instrument utilizing a nano-tip connected to a cantilever to detect vibrations through an interaction of atomic force between the tip and the target surface with sub-nanometer resolution,about 30 times more precise than the piezoelectric sensor for the same signal detection.The glass material has been chosen as the target solid.The enhancement effect of the vibrations in the glass slice around resonance frequency is confirmed,the maximum amplitude appears at 7.4 kHz.The piezo-induced vibration will be employed in our future research for developing piezo-induced and laser-induced surface acoustic wave (SAW) motor.
piezo-induced surface vibration AFP SAW motor
Fanghao Li Dongxian Zhang Haijun Zhang
State Key Laboratory of Modern Optical InstrumentationZhejiang University, Hangzhou 310027, China
国际会议
中国微米纳米技术学会第14届学术年会、第3届国际年会暨第6届微米纳米技术“创新与产业化国际研讨与展览会(CSMNT2012 & ICMAN2012)
杭州
英文
1-4
2012-11-04（万方平台首次上网日期，不代表论文的发表时间）