Chromium Atomic Deposits under the Disturbance of Straight Edge Diffraction

摘要：

　　The ideal Gaussian standing wave field model and the Gaussian standing wave field model under the condition of straight edge diffraction disturbance were established,and computer simulation and numerical analysis were done to the two kinds of models.It is concluded that the center position of Chromium atomic sedimentary grating in the straight edge diffraction disturbance standing wave will be away from the diffraction edge; near the given ideal deposit position,the PTVH(Peak to Valley Height) of Chromium atomic sedimentary grating in the ideal standing wave is higher than that in the straight edge diffraction disturbance standing wave,and the FWHM(Full Width at Half Maximum) is also narrower than in the ideal standing wave; for the exist of straight edge diffraction the size of the acceptable sedimentary pattern will be smaller,which has theoretical guidance on the practical operation.

关键词： Straight edge diffraction Gaussian standing wave FWHM PTVH

作者: Zhu Baohu Huang Jing Zhang Wentao

作者单位: School of Materials Science and Engineering, Gulin University of Electronic Technology, Guilin,China Guizhou University for Nationalities, Guiyang, China School of Electrical Engineering and Automation, Guilin University of Electronic Technology,Guilin,

会议类型: 国际会议

会议名称: 中国微米纳米技术学会第14届学术年会、第3届国际年会暨第6届微米纳米技术“创新与产业化国际研讨与展览会(CSMNT2012 & ICMAN2012)

会议地点: 杭州

会议语种:英文

页码: 1-5

在线出版日期: 2012-11-04（万方平台首次上网日期，不代表论文的发表时间）