Capillary Condensation Adhesion Phenomena and Analysis of the Micromechanical Gyroscope

摘要：

　　In MEMS,the size of micro-structure is usually in the micron and even nanoscale.Its easier to form capillary phenomenon than the macroscopic system.In view of this phenomenon,this article is based on the micro-mechanical gyroscope as the research object,to analyze the occurrence of capillary condensation of adhesion phenomenon.Firstly,we derive the Kelvin equation for capillary condensation,and then combination of the Kelvin equation introduce the capillary condensation of the adhesion phenomenon; Secondly,it analyzes the dynamics characteristics of its structure existing the liquid bridge,and analyzes the causes of the liquid bridge; Finally,it analyzes the capillary adhesion phenomena on the performance of the micro-mechanical gyroscope,as well as how to avoid the generation of capillary condensation adhesion.

关键词： MEMS Capillary Condensation Adhesion Phenomena Kelvin equation liquid bridge

作者: Yunli He Haipeng Liu Shiqiao Gao Caifeng Wang

作者单位: State Key Laboratory of Explosion Science and Technology, Beijing Institute of Technology, Beijing ,China

会议类型: 国际会议

会议名称: 中国微米纳米技术学会第14届学术年会、第3届国际年会暨第6届微米纳米技术“创新与产业化国际研讨与展览会(CSMNT2012 & ICMAN2012)

会议地点: 杭州

会议语种:英文

页码: 1-4

在线出版日期: 2012-11-04（万方平台首次上网日期，不代表论文的发表时间）