PreparatioPreparation and characterization of manganese oxide microelectrodes for MEMS supercapacitor

摘要：

　　The capacity of charge storage for supercapacitor depends on the size of the electrode surface area and the active material on the electrodes.We fabricate the three-dimensional microelectrodes with SU-8 photoresist based on the MEMS (Micro Electro Mechanical System) technology to increase the electrode surface area and carry more active material on the electrodes.Using the method of anodic electrodeposition directly fabricate three-dimensional microelectrodes.Scanning Electron Microscopy (SEM) and Energy Dispersive Spectroscopy (EDS) are used to measure and test the fabricated three-dimensional microelectrode and the composition of the electrode surface material.Cyclic voltammetry and galvanostatic current charge-discharge are used to test the electrochemical characteristics of the manganese oxide electrodes.When the discharge density is 0.5 mA cm-2,the areal capacitance for the fabricated three-dimensional microelectrodes with microstructure and the two-dimensional planar microelectrodes without microstructure is 3.68 mF cm-2 and 1.0 mF cm-2,respectively.The experimental results show that using MEMS technology to prepare three-dimensional microelectrode structure can effectively increase the electrode surface area,carry more electroactive material,thereby enhancing the charge storage capacity of the electrodes.

关键词： Micro-supercapacitors manganese oxide MEMS microelectrode SU-8 photoresist

作者: Chun-Ming WEN Zhi-Yu WEN Zheng YOU Xiao-Feng WANG Guang-zong WANG

作者单位: Key Laboratory of Fundamental Science on Micro/Nano-Device and System Technology, ChongqingUniversit Department of Precision Instruments and Mechanics, Tsinghua University, Beijing 100084, China

会议类型: 国际会议

会议名称: 中国微米纳米技术学会第14届学术年会、第3届国际年会暨第6届微米纳米技术“创新与产业化国际研讨与展览会(CSMNT2012 & ICMAN2012)

会议地点: 杭州

会议语种:英文

页码: 1-6

在线出版日期: 2012-11-04（万方平台首次上网日期，不代表论文的发表时间）