Thhe Few-layer Graphene’s Electrical Response to CH4 on Microheater

摘要：

　　In this paper,graphene films were synthesized by ambient pressure chemical vapor deposition (CVD).Raman spectra and transmission electron microscope indicated that the graphene films were few-layer.After graphene film was transferred to the microheater device,which was fabricated by Micro-Electro-Mechanical Systems (MEMS) technology,further experiment was carried out to test the electrical property of graphene.The results shown that the graphene on microheater was metallic and has increased resistance in 5% CH4 at 200℃.

关键词： graphene CVD microheater

作者: Wenrong Wang Lei Xu Chen Liang Yuchen Wang Tie Li Yuelin Wang

作者单位: State Key Laboratories of Transducer Technology, Science and Technology on MicrosystemLaboratory, Sh State Key Laboratories of Transducer Technology, Science and Technology on MicrosystemLaboratory, Sh State Key Laboratories of Transducer Technology, Science and Technology on MicrosystemLaboratory, Sh Department of Microelectronics, Peking University, Beijing 100871, China

会议类型: 国际会议

会议名称: 中国微米纳米技术学会第14届学术年会、第3届国际年会暨第6届微米纳米技术“创新与产业化国际研讨与展览会(CSMNT2012 & ICMAN2012)

会议地点: 杭州

会议语种:英文

页码: 1-4

在线出版日期: 2012-11-04（万方平台首次上网日期，不代表论文的发表时间）