Preparation and characterization of a Micro-supercapacitor with three-dimensional microelectrode arrays

摘要：

　　With the development of the MEMS technology and the more widely-used micro-systems,micro-power devices are developed for portable consumer electronics 1.The MEMS super-capacitor is one of the most important parts for micro-powers.In this paper,a micro-supercapacitor was designed and fabricated with three-dimensional microelectrode arrays configuration.It has been tested by scanning electron microscopy,Cyclic Voltammeter,Galvanostatical charge/discharge curve,and electrochemical impedance spectroscopy.These posts were 50 μm in diameter and 100 μm tall; with foot print area of 2×2mm2.The capacitance is 2.73F/cm2.The biggest feature in this paper is that the two plates of the supercapacitor are both three-dimensional microelectrode arrays which are shown to offer significant advantages.

关键词： MEMS micro-power 3-D microelectrode arrays Ruthenium oxide electrochemical capacitance

作者: Li Xiangyu Wang Xiaofeng Ma Rui Lv Wushuang You Zheng

作者单位: Department of Precision Instrument & Mechanology, Tsinghua University, Beijing, China100084

会议类型: 国际会议

会议名称: 中国微米纳米技术学会第14届学术年会、第3届国际年会暨第6届微米纳米技术“创新与产业化国际研讨与展览会(CSMNT2012 & ICMAN2012)

会议地点: 杭州

会议语种:英文

页码: 1-7

在线出版日期: 2012-11-04（万方平台首次上网日期，不代表论文的发表时间）