A Novel Z-axis Capacitance Accelerometer with Highly Symmetrical 16-beam Structure
A novel highly symmetrical 16-beam sandwich structure Z-axis differential capacitance accelerometer is presented.In this design,the proof mass is suspended symmetrically by double-side of 16 straight beams with highly uniform dimension which can reduce the cross-axis sensitivity and rotational influences dramatically.Parameters of the beam-mass structure were analyzed and optimized by finite element analysis (FEA) software.The micro accelerometer is based on bulk-micromachining by DRIE and KOH anisotropic wet etching technologies.The beam-mass structure was released by anisotropic wet etching on both device layer sides simultaneously.The fabricated accelerometer was measured over the maximum range of 30g gravity field,results of measurement show that the close-loop sensitivity is 80mV/g,the nonlinearity is 0.27%,and the bias stability is 0.63mg for an hour.
capacitance accelerometer highly symmetric Z-axis MEMS
Wei Li Lufeng Che Xiaolin Li Jian Wu Yuelin Wang
State Key Laboratory of Transducer Technology & Science and Technology on Micro-systemLaboratory, Sh State Key Laboratory of Transducer Technology & Science and Technology on Micro-systemLaboratory, Sh
国际会议
中国微米纳米技术学会第14届学术年会、第3届国际年会暨第6届微米纳米技术“创新与产业化国际研讨与展览会(CSMNT2012 & ICMAN2012)
杭州
英文
1-5
2012-11-04（万方平台首次上网日期，不代表论文的发表时间）