Design and fabrication of a MEMS polymeric micropump

摘要：

　　This paper introduces a polymeric micropump actuated by a PZT bimorph,the substrate is processed by PMMA,and the micro passive valves are fabricated by SU-8 lift-off technology.Firstly,the vibration performances of parts of the micropump including PZT,membrane and valve are analyzed by finite analysis method,it can contribute to optimize the structure and drive unit of the micropump.Then,the valve unit is assembled by ultrasonic bonding,a energy director is designed to realize the installation of valves.At last,the flow performance of the micropump is studied by frequency sweeping experiments,experimental results approximately coincide with the theoretical analysis,and it offers ways to design and fabricate micropumps in future.

关键词： PZT bimorph vibration performance ultrasonic bonding

作者: Yi Luo Xianglong Yin Xiaodong Wang Xu Yan

作者单位: Key Laboratory for Micro/Nano Technology and System of Liaoning Province,Dalian University of Technology, Dalian 116023, China

会议类型: 国际会议

会议名称: 中国微米纳米技术学会第14届学术年会、第3届国际年会暨第6届微米纳米技术“创新与产业化国际研讨与展览会(CSMNT2012 & ICMAN2012)

会议地点: 杭州

会议语种:英文

页码: 1-6

在线出版日期: 2012-11-04（万方平台首次上网日期，不代表论文的发表时间）