Design and Manufacture of Micro Interference System In Spatial Modulation Fourier Transform Spectrometer
Spatial modulation Fourier transform spectrometer(FTS) based on micro step mirror arrays with high optical path difference sampling precision was a new high-tech measuring instrument.To depress the interferogram aliasing resulted from the chromatic dispersion of beam splitter,considering interferogram contrast reversal as the criterion of image degradation,the thickness difference between beam splitter and compensating plate was determined smaller than 0.2μm.So as to restrain the ghost images induced by secondary reflection on the surface of beam splitter,the transmittance of anti-reflection film should be more than 98% and the transmittance of beam splitter film should be controlled within (50±5) %.Since the restriction of processing method and machining accuracy to micro step mirrors,the thickness deviation and angle deviation existed between various sub-mirrors.After the error synthesis to sub-mirror errors using Monte Carlo method,the tolerance of the thickness deviation and angle deviation was controlled in 1μm and 2×10-5rad.Meanwhile,the step height deviation of micro step mirrors may induce non uniform sampling to interference signal.Thus a spectrum method by least-squares cosines progression arithmetic was advanced and the validity of which was demonstrated well.
Fourier transform spectrometer Micro interference system Micro step mirror
Lv Jin-guang Liang Jing-qiu Liang Zhong-zhu Qin Yu-xin Tian Chao Wang Wei-biao
State Key Laboratory of Applied Optics, Changchun Institute of Optics, Fine Mechanics and Physics,Ch State Key Laboratory of Applied Optics, Changchun Institute of Optics, Fine Mechanics and Physics,Ch
国际会议
中国微米纳米技术学会第14届学术年会、第3届国际年会暨第6届微米纳米技术“创新与产业化国际研讨与展览会(CSMNT2012 & ICMAN2012)
杭州
英文
1-6
2012-11-04（万方平台首次上网日期，不代表论文的发表时间）