The Design and Analysis of the Micro-nano Adjusting Device for the Precision Tiled Grating

摘要：

　　The micro-nano adjusting mechanism is constructed by differential thread and piezoelectric actuator and it uses latched compensation and four-point differential method to improve the PID control algorithm,so it can avoid the saturated incremental loss and reduce the adjusting error.The noncoplanar error of the tiled grating has reached 17μm,and translation accuracy is less than 10nm,and the rotational accuracy is less than 0.2μrad.The assembled spot can be hold in one hour.

关键词： tiled grating micro-nano adjusting device PID control accuracy stability

作者: Yi Zhou Yunfei Liao Bo Tan Dong Zuo Youhai Liu

作者单位: State Key Laboratory of Mechanical Transmission, Chongqing University, Chongqing, 400030 China College of Mechanical Engineering, Chongqing University, Chongqing, 400030, China

会议类型: 国际会议

会议名称: 中国微米纳米技术学会第14届学术年会、第3届国际年会暨第6届微米纳米技术“创新与产业化国际研讨与展览会(CSMNT2012 & ICMAN2012)

会议地点: 杭州

会议语种:英文

页码: 1-5

在线出版日期: 2012-11-04（万方平台首次上网日期，不代表论文的发表时间）